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Silicon Anodization as a Structuring Technique
Silicon Anodization as a Structuring Technique
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Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed. ​
  • Leidėjas:
  • Metai: 2017
  • ISBN-10: 3658192372
  • ISBN-13: 9783658192372
  • Formatas: 14.8 x 21 x 1.8 cm, minkšti viršeliai
  • Kalba: Anglų

Silicon Anodization as a Structuring Technique (el. knyga) (skaityta knyga) | knygos.lt

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Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.

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  • Autorius: Alexei Ivanov
  • Leidėjas:
  • Metai: 2017
  • ISBN-10: 3658192372
  • ISBN-13: 9783658192372
  • Formatas: 14.8 x 21 x 1.8 cm, minkšti viršeliai
  • Kalba: Anglų

Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.

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