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Aprašymas

Quoting from the preface, "Most of the authors of this book are well known specialists in different areas of microwave plasma physics, technique and plasma processing. Topics cover all problems of theory, experiments and applications of microwave discharges and yield the state-of-the-art trends in discharge theory, modelling, and diagnostics, methods of microwave plasma generation, high and low pressure microwave discharges, interaction of microwaves with a plasma, applications of microwave plasma (surface treating, etching, film deposition, growth of structures, light sources, analytical chemistry, etc.) We hope that this book will be useful for all specialists who work in low temperature plasma physics and processing.