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An up-to-date guide to the theory and applications of RF MEMS. With detailed information about RF MEMS technology as well as its reliability and applications, this is a comprehensive resource for professionals, researchers, and students alike. * Reviews RF MEMS technologies * Illustrates new techniques that solve long-standing problems associated with reliability and packaging * Provides the information needed to incorporate RF MEMS into commercial products * Describes current and future trends in RF MEMS, providing perspective on industry growth * Ideal for those studying or working in RF and microwave circuits, systems, microfabrication and manufacturing, production management and metrology, and performance evaluation